Scanning Probe Microscopy
Scanning probe microscopy (SPM) refers to several techniques that
use the interaction of a microscopic probe with the surface of a
sample to measure characteristics of the sample at localized points.
By scanning the sample with the probe in a two-dimensional pattern
(like an electron beam scans a television screen), an image of the
sample can be produced, sometimes to atomic scale resolution. Depending
on the nature of the interaction, the image may represent the topography,
magnetic properties, or various electrical properties.
The probe is typically mounted on a cantilever. The cantilever
is attached to the microscope at one end and the probe is attached
at the other end. When the probe interacts with the surface of a
sample, the cantilever may deflect (bend) or vibrate. By measuring
the deflection of the cantilever or electrical properties between
the probe tip and the surface, the interaction at points along the
surface of the circuit under test can be measured.
Scanning Probe Microscopy can broken up into several different
subfields which are named after the interaction they represent.
The following is a list of SPM techniques that our group has been
doing research in the past several years in order to improve our
understanding of electrical properties on a microscopic level. To
learn more about each of the following subfields of scanning probe
microscopy, simply click on the subfield of interest.
- Atomic Force Microscopy
- Scanning Capacitance Microscopy
- Scanning Tunneling Microscopy
- Magnetic Force Microscopy
- Scanning Resistance Microscopy
- Electrostatic Force Microscopy
Some of these techniques are not currently being researched in
our lab, however for completeness they have all been listed. In
order to determine which topics we are currently researching, please
click on current research under scanning probe microscopy. |